{"id":234,"date":"2023-03-27T16:57:02","date_gmt":"2023-03-27T07:57:02","guid":{"rendered":"https:\/\/hkd.co.jp\/wordpress\/?post_type=press&#038;p=234"},"modified":"2023-10-04T10:18:38","modified_gmt":"2023-10-04T01:18:38","slug":"press_tec","status":"publish","type":"press","link":"https:\/\/hkd.co.jp\/english\/press\/press_tec\/","title":{"rendered":"Technical data\uff1aPressure Sensor Working Principle"},"content":{"rendered":"\n<h1 class=\"wp-block-heading has-text-color\" style=\"color:#2f739d;font-size:34px\"><strong>Technical data\uff1aPressure Sensor Working Principle<\/strong><\/h1>\n\n\n\n<div style=\"height:70px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading has-text-color\" style=\"font-size:30px\"><strong>Pressure Sensor Working Principle<\/strong><\/h2>\n\n\n\n<div style=\"height:20px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:80%\">\n<div class=\"wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\"><iframe loading=\"lazy\" width=\"560\" height=\"315\" src=\"https:\/\/www.youtube.com\/embed\/7trqng7REz4?rel=0\" title=\"YouTube video player\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" allowfullscreen><\/iframe><\/div><\/div>\n<\/div>\n<\/div>\n\n\n\n<div style=\"height:70px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\" style=\"font-size:30px\"><strong>Type of pressure sensor<\/strong><\/h2>\n\n\n\n<div style=\"height:15px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:40%\">\n<p>There are many types of pressure sensors, but they are classified as shown in the table on the right based on materials.<br>Sensors made of semiconductor Si have a sensitivity that is about one order of magnitude higher than resistance wire sensors that use Ni and Cu alloys, and are the most widely produced.<br>Among them, the diffusion type, which is made by applying micromachining technology, is highly mass-producible, and the relative pressure (=gauge pressure) type can cover a wide range of about 2 kPa to 20 MPa, and the absolute pressure type can also be manufactured.<br>On the other hand, the film-forming type using a SUS diaphragm is suitable for high pressure applications, and the capacitance type using parallel plates is suitable for low pressure applications.<br>Diffusion and capacitive sensors have also been produced as integrated sensors. As for the package, mainly CAN is used for automobiles, plastic for consumer use, and SUS case for high-pressure and food products.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:60%\">\n<div class=\"tablewrap\">\n<table style=\"border-collapse: collapse; width: 100%; height: 370px;\" border=\"1px\">\n<tbody>\n<tr style=\"height: 46px;\">\n<th style=\"text-align: center; vertical-align: middle; background-color: #c8e1ed; height: 46px;\">Material<\/th>\n<th style=\"text-align: center; vertical-align: middle; background-color: #c8e1ed; height: 46px;\">Method<\/th>\n<th style=\"text-align: center; vertical-align: middle; background-color: #c8e1ed; height: 46px;\">Output element<\/th>\n<th style=\"text-align: center; vertical-align: middle; background-color: #c8e1ed; height: 46px;\">Displacement<br \/>Base material<\/th>\n<th style=\"text-align: center; vertical-align: middle; background-color: #c8e1ed; height: 46px;\">Package<\/th>\n<\/tr>\n<tr style=\"height: 46px;\">\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Ni, Cu alloy<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Resistance wire type<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Strain gauge<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Polyimide etc. sheet Sheet of polyimide, etc.<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Nothing<br \/>SUS<\/td>\n<\/tr>\n<tr style=\"height: 70px;\">\n<td style=\"text-align: center; vertical-align: middle; height: 162px;\" rowspan=\"3\">Semiconductor silicon<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">Diffusion type<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">Strain gauge<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">Si diaphragm<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">CAN<br \/>Plastic<br \/>SUS<\/td>\n<\/tr>\n<tr style=\"height: 46px;\">\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Deposition type<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Strain gauge<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">SUS Diaphragm<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">SUS<\/td>\n<\/tr>\n<tr style=\"height: 46px;\">\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Capacitive type<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Al film<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Si diaphragm<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Plastic<\/td>\n<\/tr>\n<tr style=\"height: 46px;\">\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Ceramic<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Capacitive type<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Metal film<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">Alumina<br \/>Diaphragm<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 46px;\">SUS<\/td>\n<\/tr>\n<tr style=\"height: 70px;\">\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">Others<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">Mechanical type<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">Sliding resistance<br \/>Brass plate<br \/>Light receiving element<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">Spring<\/td>\n<td style=\"text-align: center; vertical-align: middle; height: 70px;\">Many kinds<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<\/div>\n\n\n\n<div style=\"height:70px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p style=\"font-size:30px\"><strong><strong>Working Principle of Diffusion Pressure Sensor<\/strong><\/strong><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:50%\">\n<p>Working Principle of Diffusion Pressure Sensor<br>As shown in the plan view of the figure 1, the pressure sensor chip has strip-shaped gauges formed at four locations in the same direction by impurity diffusion and as shown in the cross-sectional view, the diaphragm-processed Si is bonded to the glass pedestal, and become chip.<\/p>\n\n\n\n<p><br>When this sensor chip is built into various cases and pressure is applied from the glass pedestal side, the A and C gauges are deformed like \u30a4in the schematic diagram and the resistance value increases, and the B and D gauges are&nbsp; deformed\u3000like \u30ed and the resistance value decreases.<br>Practically, it is connected to a Wheatstone bridge as shown in the wiring diagram, and the potential difference between the + and &#8211; terminals is used as the output. Contrary to the previous case, when pressure is applied from the Si side, the increase and decrease of the gauge resistance will be reversed, and the + and \u2013 of the output will also be reversed accordingly.<br>Some chips are wired full bridge on the Si surface, while others are easy to adjust the offset voltage externally by opening the No. 1 and No. 6 terminals as shown in this figure.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:50%\">\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"816\" height=\"783\" src=\"https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure1.png\" alt=\"\" class=\"wp-image-2383\" srcset=\"https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure1.png 816w, https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure1-300x288.png 300w, https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure1-768x737.png 768w\" sizes=\"auto, (max-width: 816px) 100vw, 816px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div style=\"height:70px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p style=\"font-size:30px\"><strong><strong><strong>Structure of the pressure sensor<\/strong><\/strong><\/strong><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:50%\">\n<p>The figure 2 shows the cross-sectional structure of a case-type semiconductor pressure sensor for gauge pressure.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:50%\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"649\" src=\"https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure2-1024x649.png\" alt=\"\" class=\"wp-image-2385\" srcset=\"https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure2-1024x649.png 1024w, https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure2-300x190.png 300w, https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure2-768x487.png 768w, https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure2-1536x974.png 1536w, https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure2.png 1626w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div><\/div>\n<\/div>\n\n\n\n<div style=\"height:70px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p style=\"font-size:30px\"><strong><strong><strong><strong>Various characteristics of pressure sensors<\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:50%\">\n<p>Pressure sensors are required to have many characteristics as shown below.<\/p>\n\n\n\n<ul class=\"list-style-indent wp-block-list\">\n<li>1. Bridge resistance<\/li>\n\n\n\n<li>2. Offset voltage (output voltage at 0 kPa)<\/li>\n\n\n\n<li>3. Output span voltage (output voltage &#8211; offset voltage)<\/li>\n\n\n\n<li>4. Linearity (deviation between output at 1\/2 rated pressure and calculated value)<\/li>\n\n\n\n<li>5. Pressure hysteresis (Difference when rated pressure is applied and returned to 0 kPa)<\/li>\n\n\n\n<li>6. Breakdown voltage (reciprocal with output span voltage)<\/li>\n\n\n\n<li>7. Temperature characteristics<\/li>\n\n\n\n<li>8. Reliability<\/li>\n<\/ul>\n\n\n\n<p>The main characteristics are the output span voltage (Fig. 3) and breakdown voltage histogram (Fig. 4) of our product.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:50%\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img decoding=\"async\" src=\"https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure34.png\" alt=\"\" class=\"wp-image-2386\" style=\"width:370px\" width=\"370\" srcset=\"https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure34.png 783w, https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure34-244x300.png 244w, https:\/\/hkd.co.jp\/english\/wordpress\/wp-content\/uploads\/2023\/09\/Figure34-768x945.png 768w\" sizes=\"(max-width: 783px) 100vw, 783px\" \/><\/figure>\n<\/div><\/div>\n<\/div>\n\n\n\n<div style=\"height:70px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n","protected":false},"featured_media":0,"template":"","meta":{"_acf_changed":false},"press-cat":[17],"class_list":["post-234","press","type-press","status-publish","hentry","press-cat-press_doc"],"acf":[],"_links":{"self":[{"href":"https:\/\/hkd.co.jp\/english\/wp-json\/wp\/v2\/press\/234","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/hkd.co.jp\/english\/wp-json\/wp\/v2\/press"}],"about":[{"href":"https:\/\/hkd.co.jp\/english\/wp-json\/wp\/v2\/types\/press"}],"wp:attachment":[{"href":"https:\/\/hkd.co.jp\/english\/wp-json\/wp\/v2\/media?parent=234"}],"wp:term":[{"taxonomy":"press-cat","embeddable":true,"href":"https:\/\/hkd.co.jp\/english\/wp-json\/wp\/v2\/press-cat?post=234"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}